Synthesis, characterization, and thermal properties of silicon(IV) compounds containing amidinate ligands as CVD precursors by Wenxiang Chu & Liyong Du & Chongying Xu & Yuqiang Ding

Synthesis, characterization, and thermal properties of silicon(IV) compounds containing amidinate ligands as CVD precursors by Wenxiang Chu & Liyong Du & Chongying Xu & Yuqiang Ding

Author:Wenxiang Chu & Liyong Du & Chongying Xu & Yuqiang Ding
Format: pdf
Tags: Synthesis, amidinate, silicon(IV) compounds, thermal properties, CVD precursors
Publisher: Taylor & Francis
Published: 2016-08-11T09:32:47+00:00


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