Synthesis, characterization, and properties of silicon (IV) compounds containing N,N'-symmetrically alkyl substituted 1,3-diketimine ligands and their potential as CVD precursor material by Liyong Du & Wenxiang Chu & Yuqiang Ding

Synthesis, characterization, and properties of silicon (IV) compounds containing N,N'-symmetrically alkyl substituted 1,3-diketimine ligands and their potential as CVD precursor material by Liyong Du & Wenxiang Chu & Yuqiang Ding

Author:Liyong Du & Wenxiang Chu & Yuqiang Ding
Format: pdf
Tags: Synthesis, characterization, thermal properties, CVD precursors, diketimines
Publisher: Taylor & Francis
Published: 2017-10-09T01:35:21+00:00


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