Helium Ion Microscopy by David C. Joy

Author:David C. Joy
Language: eng
Format: epub
Publisher: Springer New York, New York, NY

4.8 Backscattered Ion Imaging

As noted in the previous sections, ion-induced secondary electrons (iSE) are a convenient and uniquely powerful tool for imaging in the HIM, but the interaction of the incident ions with the sample produces other signal types which can provide additional information to compliment the iSE data. For example, some fraction of the incident ion beam is backscattered, i.e., the ion is deflected through an angle greater than 90°, a process often called Rutherford backscattering (RBS) imaging (Rutherford 1911) (Fig. 4.11).

Fig. 4.11Comparison of an iSE image (left) with a chemically sensitive RBI image (right) of copper mesh exposed to the atmosphere. Beam energy 36 kV and field of view 20 mm

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