Epitaxy of Semiconductors by Udo W. Pohl
Author:Udo W. Pohl
Language: eng
Format: epub
ISBN: 9783030438692
Publisher: Springer International Publishing
During surface diffusion the adatom encounters other atoms on the surface. The probability of such a meeting depends on the areal density of single migrating atoms, and the areal density of clusters containing more than one atom. In our approach we assume the clusters to be stationary, i.e., single adatoms are the only species which are mobile.
The clusters on the surface are divided according to their size into subcritical clusters with atom numbers , and stable clusters, , the density of which is summed as
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