Theory of Low-Temperature Plasma Physics by Shi Nguyen-Kuok

Author:Shi Nguyen-Kuok
Language: eng
Format: epub
Publisher: Springer International Publishing, Cham

Fig. 7.25Changes of current density of plasma j 1–j 8 in the sections z = 4, 10, 16, 26, 36, 48, 80 and 120 mm, respectively

Fig. 7.26The distribution of power density of discharge

Fig. 7.27Changes of power density in discharge sections P 1–P 8, z = 4, 10, 16, 26, 36, 48, 80, and 120 mm, respectively

The phase shifts of plasma currents, compared to the current in inductor, are shown in Fig. 7.28. Note that between the temperature and the phase shift of a certain connection: experimental results (Sect. 7.1) and simulation of the RF plasma torch show that the temperature in the channels of different the RF plasma torches are not significantly different, and the distribution of phase shifts of currents in plasma in these channels have approximately the same shape as in Fig. 7.28.

Fig. 7.28The phase shifts of currents in the discharge in comparison with the current in inductor

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