Advanced Control of Piezoelectric Micro-Nano-Positioning Systems by Qingsong Xu & Kok Kiong Tan

Author:Qingsong Xu & Kok Kiong Tan
Language: eng
Format: epub
Publisher: Springer International Publishing, Cham

Fig. 5.5The 10-nm consecutive step positioning results

Next, a consecutive step positioning with a step size of 10 nm is performed and the results are shown in Fig. 5.5. The steps can be identified from the results, which indicates that the positioning resolution of the system is about 10 nm. Additionally, the observer output indicates that the sliding-mode observer is capable of estimating the state from the noisy sensor readings.

Fig. 5.6Sinusoidal tracking results of MPOIDSMC with different parameters w

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