A user-friendly guide to the optimum ultraviolet photolithographic exposure and greyscale dose of SU-8 photoresist on common MEMS, microsystems, and microelectronics coatings and materials by Matthieu Gaudet & Steve Arscott
Author:Matthieu Gaudet & Steve Arscott , Date: March 3, 2022
,Views: 13
Author:Matthieu Gaudet & Steve Arscott
Format: pdf
Tags: Analytical Methods (2017), 9, 2495-2504, doi:10.1039/C7AY00564D
Publisher: Royal Society of Chemistry
Published: 2017-04-29T01:04:59+00:00
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