An algorithm for boron diffusion in MOS transistors using Silvaco Athena and MATLAB by N. Guenifi & R. Mahamdi & I. Rahmani

An algorithm for boron diffusion in MOS transistors using Silvaco Athena and MATLAB by N. Guenifi & R. Mahamdi & I. Rahmani

Author:N. Guenifi & R. Mahamdi & I. Rahmani
Format: pdf
Tags: Boron diffusion, polysilicon, thermal annealing, finite difference method, Silvaco
Publisher: Taylor & Francis
Published: 2018-01-31T07:27:15+00:00


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